Parts

"CBL ASY, J-1 , ROBOT INTERF ACE"
"8611070030 V2630052100"

"Shuttle Platform Feedthru PIN VACUUM "
"8611070247 V9141600500

CST NEST GRD
"8611070057 V2631485100"

PB3D003M200
P/N: 1107260223 B

COMET
CFMN-150CAC/15-AF-G

PBM603FCE20
P/N: 08111 2011

AMAT BLOCKER PLATE.TEOS
P/N: 0042-54772

AMAT Supported Faceplate Flat with Groove TEOS Large Electrode Producer Precision
P/N: 0041-92620

AMAT BLOCKER PLATER , LF TEST BLANK , PRODUCER
P/N: 0022-62769

AMAT 300mm CVD (Producer / Ultima-X Tool Used )
P/N: 0022-15497
P/N: 0041-00830
P/N: 0041-79433

AMAT 300mm Radiance Pyro Pyrometer RTP Probe
0010-18024
AMAT ASSY 2MM PYROMETER RADIANCE CHAMBER
0010-03172
AMAT Pyro Pyrometer Probe
0190-38932
AMAT Pyrometer /（Pyro Probe）
0010-44213
AMAT PMAX Emissometer Probe Assembly
0010-23715

MKS Revolution Ⅲ Revolution Ⅲ AX7695
M/N: R*evolution III
MKS P/N: AX7695PSK-10