Parts

AMAT CHAMBER UPPER LINER 300MM DPS2
P/N: 0040-81156

LAM Power Matching Device
P/N: 925-186371-330

VERITY EYE D PRECISION ENDPOINT SYSTEM
P/N: 0190-42853
M/N: SD1024G-2-S

NSK 300MM XP Robot Driver
P/N: 0190-28822
M/N: M-ELC-JG014VF4-01

Edwards SCU-800
TURBOMOLECULAR PUMP CONTROL UNIT
P/N: YT49-ZT-Z10
M/N: 3U80-000812-11

AE APEX1513
P/N: 0920-00127
M/N: 3156111-207

AMAT Power Supply
P/N: 0090-11139

HVM ECAT CVD CIOC
AMAT 0190-51551

GASLINE HEATER CONTROL UNIT
AMAT P/N: 0242-63715
M/N.: VAS104350-0417

AMAT GASLINE HEATER CONTROL UNIT
P/N: 0242-63708
M/N.: VAS104350-0115

AMAT CHAMBER AC BOX
AMAT P/N: 0195-11900
DIAGRAM NO.: 0180-06306

AMAT CHAMBER AC BOX
AMAT P/N: 0195-15023
DIAGRAM NO.: 0180-07659